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| 标题 | In-situ Dry Etching Of InP Using Phosphorus Tri-chloride And Re-growth Inside A Chemical Beam Epitaxial Growth Chamber |
| 网址 | |
| DOI | 10.1557/proc-300-203 |
| 其他 | 期刊：Materials Research Society Symposium Proceedings 作者：R.M. Kapre;W.T. Tsang;P.F. Jr. Sciortino 出版日期：1993 |
| 求助人 | 执笔画素颜 在 2023-05-27 18:24:35 发布，悬赏 |
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