【已完结】 Growth Kinetics Of Nanocrystalline Silicon From SiH2Cl2 By Plasma-enhanced Chemical Vapor Deposition 搜知猫 - 外文文献互助服务平台

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标题	Growth Kinetics Of Nanocrystalline Silicon From SiH2Cl2 By Plasma-enhanced Chemical Vapor Deposition
网址	https://doi.org/10.1016/s0022-3093(99)00776-0
DOI	10.1016/s0022-3093(99)00776-0
其他	期刊：Journal of Non-Crystalline Solids 作者：H. Shirai;C. Fukai;Y. Sakuma;Y. Moriya 出版日期：2000
求助人	草长莺飞在 2024-11-06 18:37:28 发布，悬赏 30 积分
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