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标题	Laser Direct Write For Release Of SiO2 Mems And Nano-scale Devices
网址	https://doi.org/10.1117/12.596553
DOI	10.1117/12.596553
其他	期刊：Proceedings of SPIE - The International Society for Optical Engineering 作者：M. Abraham;H. Helvajian 出版日期：2004
求助人	-゛是非弄人▂ 在 2025-01-25 21:52:05 发布，悬赏 10 积分
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